Resistivity Standards (RS) and Sheet Resistance Standards are 3 inch as-lapped silicon wafer designed for calibrating both contact and non contact resistivity measuring instruments. These products are created by sawing a doped single crystalline ingot into wafers and then lapping and chemically cleaning them to VLSI Standards’ specifications.
All measurement of these standards have been done in accordance with ASTM Method F-84, with the added step of measuring the standard in a dark box that has been shielded and grounded. These products are measured at a single point in the center of the wafer(±5mm) and corrected to a temperature factor of 23℃.
3 inch Resistivity Standards
| Model No. |
Silicon Wafer type |
Bulk Resistivity |
S. Resistance |
| RS3-0.002 |
p-type <100> |
0.002 Ω ·cm |
0.04Ω /sq |
| RS3-3.0 |
p-type <111> |
3 Ω ·cm
|
60 Ω /sq |
| RS3-180 |
p-type <100> |
180 Ω ·cm |
3500 Ω /sq |
|
Sheet Resistance Standards
| Model No. |
Silicon Wafer type |
S. Resistance |
Thickness |
| RS3-0.002 |
As-lapped Wafer |
20~25m Ω /sq |
635 ㎛ |
| RS3-4 |
As-lapped Wafer |
3 ~6Ω/sq |
381㎛ |
|
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