Feature

Measures the sheet resistance(ohm/sq) & resistivity(ohm.cm) of Wafer (up to 12 inches), Thin film, etc.
Full remote control & Data Anaysis
Easy to use
Multi - function


Configuration

Four point probe head unit.
The system consists of following components.
. Bridge type X-Y-Z Axis Robot.
. Sample stage for Flat panel.
. LED for process signal.
. Remote control communication port.
. Power key switch
. Operating & Analysis Software
. Standard accessories
- Power connection cable.
- Remote control communication cable.
- Operating & service manual.


Specification

* Measurement Range
1 m¥Ø/sq ~ 2 M¥Ø/sq ( V/I = 0.2 m¥Ø ~ 450k¥Ø)

* Probe Head
Convenient plug-in probe head / adapter assembly permits changing or replacing have worn probe heads in minutes without special tools or alignment fixtures.
Jandel probe heads are provided as standard equipment.

* Measurement Time
Approx. 3¡¾1sec/point

* Electronic Accuracy
0.5% for V/I of 5m¥Ø to 10K¥Ø at ambient temperature of 23¡ÆC¡¾1

* Maintenance & Service
The microprocessor based electronics employ state of the art component for trouble free operation and high reliability.
All electronic components mounted on easily replaced printed boards

* Operating software
Full remote control (RS232C Interface) & Data analysis software (windows version)
Lifetime FREE software upgrades






* Options
Spare Probe Head, VLSI Standard Wafer, etc