Features

- Auto contact system
- Auto range selection
- High quality probe head
- Data download software(Windows 95 / 98 / NT Version)


Specification

1. Sheet resistance
Measuring method: Contact by 4-point probe
Measuring range: 1 m§Ù /sq ~ 2 M§Ù /sq

2. Resistivity
Measuring method: Contact by 4-point probe (Input thickness)
Measuring range: 10.0 m§Ù ¡¤cm ~ 200.0 K§Ù ¡¤cm

3. Current source range
DC Current: 10nA ~ 100mA
DVM: 0V ~ 2,000mV

4. Measurement accuracy
¡¾0.5% (VLSI Standard wafer, when 23¡É)

5. Data download software (RS232C)
Real time measurement data down load
Line or Bar graph analyzer & print
Data save & Load

6. Specimen & Measuring
Max 8¡± / center 1 point

7. Measuring time
Approx. 3 ¡¾1 sec/point

8. Power requirement
Line voltage: AC 220V ¡¾10%
Electric power : 40W, 500mA
Line frequency: 50 ~ 60 Hz

9. Outside dimensions
254(W) X 562(D) X 260mm(H)

10. Data download software . . . click!

11. Manual . . . click!