Introduction

The CMT-SR3000LA is a measurement system for sheet resistance and Resistivity of a plain rectangle sample such as LCD, ITO, TFT, TPH, Thin Film, etc. And it is designed to work for remote function to meet automation such as automatic sample load and unloading.


Feature

. Bridge type X-Y-Z robot & Cassette auto loader / unloader system
. Automatic range selection.
. Dimension of measurement is max 600 × 720 mm
. Perfect remote control by operating software.
. Data analysis.(2D, 3D mapping / Diameter scan / Trend chart, etc)
. Anti Static System.
. MGV, AGV application.
. SECS I,II application
. Glass & Cassette centering.
. Glass random access.


Configuration

The system consists of following components. . 4 point probe head unit.
. Bridge type X-Y-Z Axis Robot.
. Sample stage for Flat panel.
. For Sample load pork.
. Signal tower for process signal.
. Remote control communication port.
. Power key switch
. Operating & Analysis Software
. Standard accessories
- Power connection cable.
- Remote control communication cable.
- Operating & service manual.


Specification

Sheet resistance measurement
Measuring method : Contacted by four-point probe
Measuring range : 1 mΩ/sq ∼ 2 MΩ/sq

Resistivity measurement
Measuring method: Contacted by four-point probe (Input thickness)
Measuring range: 10.0 μΩ·cm ∼ 200.0 KΩ·cm

Current Source
10nA to 100mA
DVM 0V to 2,000mV
Accuracy: 0.2 % (KRISS Circuits)
Measurement Accuracy
±0.5 % (VLSI Standard Wafer, When 23°C)
Operating software
- Measurement condition creation.
- Sample size, measure point interval, test mode, etc
- Save & load : Data, Sample type, measure point, etc.
- Data analysis : 2D, 3D mapping, Data map, etc.
- Data & mapping printout.

Measurement mode (S/W)
- Auto measurement: Point interval designation by user.
- Quick measurement: 9, 13, 25 pattern Quick Mode.
- Point measurement : Appointment on wafer by mouse.
- Manual measurement : Appointment on wafer by arrow key.


* Standard Specimen
Rectangle type sample : Max 600 X 720 mm

* Measuring time
 Approx. 3 ± 1 sec/point

* Software (Windows 95 / 98 / NT)
Operating personal computer: IBM PC/AT Compatibles

* Utility requirements
Power requirements
Line voltage : AC 230V ±10%
Electric power : 100 W, 500 mA
Line frequency : 50 Hz
Air requirements
- Line press: 200 mmHg
- Vacuum requirements
- Line press: 200 mmHg