Features

- Auto contact system
- Auto range selection
- High quality probe head
- Full remote control & Data Anaysis software(Windows Version)
- ASTM & SEMI quick measurement mode


Configuration

Four point probe head unit.
The system consists of following components.
. X-Y-Z axis full automatic system.
. Remote control communication port.
. Vacuum connector. (200mmHg)
. Operating & Analysis Software
. Standard accessories
- Power connection cable.
- Remote control communication cable.
- Operating & service manual.


Specification

1. Sheet resistance
Measuring method: Contact by 4-point probe
Measuring range: 1 m§Ù /sq ~ 2 M§Ù /sq

2. Resistivity
Measuring method: Contact by 4-point probe (Input thickness)
Measuring range: 10.0 m§Ù ¡¤cm ~ 200.0 K§Ù ¡¤cm

3. Current source range
DC Current: 10nA ~ 100mA
DVM: 0V ~ 2,000mV

4. Measurement accuracy
¡¾0.5% (VLSI Standard wafer, when 23¡É)

5. Operating software
Full remote control (RS232C Interface) & Data analysis software
Lifetime FREE software upgrades





6. Specimen & Measuring
wafer: Max 8¡±

7. Measuring time
Approx. 3 ¡¾1 sec/point

8. Power requirement
Line voltage: AC 220V ¡¾10%
Electric power : 40W, 500mA
Line frequency: 50 ~ 60 Hz

9. Outside dimensions
254(W) X 562(D) X 260mm(H)

10. Manual . . . click!